MEEG 651 - Introduction to Microsystems

Credit(s): 3

INTRODUCTION TO MICROSYSTEMS
Component: Lecture
This course examines the mechanical, thermal, optical, fluidic, chemical, and biological devices that can be derived using modern microfabrication methods. Topics include typical fabrication steps, device physics and mechanics, and a survey of existing and emerging device areas.
Repeatable for Credit: N Allowed Units: 3 Multiple Term Enrollment: N Grading Basis: Student Option
PREREQ: PHYS208/PHYS228 or PHYS245 or graduate standing.